Date of Award
1997
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Chemical and Materials Engineering
Recommended Citation
Bui, Bang, "Characterizatioin of HF/H₂O vapor phase etching of SiO₂" (1997). Master's Theses. Paper 1555.
http://scholarworks.sjsu.edu/etd_theses/1555
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