Date of Award
1997
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Materials Engineering
Recommended Citation
Chung, Anthony Hyunwoo, "Reactive ion etching of SiO₂ using CHF₃/CO₂ gas mixture" (1997). Master's Theses. Paper 1565.
http://scholarworks.sjsu.edu/etd_theses/1565
COinS