Date of Award
2004
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Chemical and Materials Engineering
Recommended Citation
Lim, Jongchul, "Characterization of thin SiO₂ and SiO[subscript x]N[subscript y] grown by thermal oxidation" (2004). Master's Theses. Paper 2668.
http://scholarworks.sjsu.edu/etd_theses/2668
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