Microelectronics Process Engineering at San Jose State University: A Manufacturing-Oriented Interdisciplinary Degree Program

Authors

Emily Allen, San Jose State University
Stacy H. Gleixner, San Jose State UniversityFollow
David W. Parent, San Jose State UniversityFollow
Greg Young, San Jose State University
Yasser Dessouky, San Jose State UniversityFollow
Linda Vanasupa, San Jose State University

Document Type

Article

Publication Date

3-1-2002

Publication Title

International Journal of Engineering Education

Volume

18

Issue Number

5

First Page

519

Last Page

525

Abstract

San Jose State University's new interdisciplinary curriculum in Microelectronics Process Engineering is described. This baccalaureate program emphasizes hands-on thin-film fabrication experience, manufacturing methods such as statistical process control, and fundamentals of materials science and semiconductor device physics. Each course of the core laboratory sequence integrates fabrication knowledge with process engineering and manufacturing methods. The curriculum development process relies on clearly defined and detailed program and course learning objectives. We also briefly discuss our strategy of making process engineering experiences accessible for all engineering students through both Lab Module and Statistics Module series.

Comments

Copyright © 2002 TEMPUS Publications.

Recommended Citation

Emily Allen, Stacy H. Gleixner, David W. Parent, Greg Young, Yasser Dessouky, and Linda Vanasupa. "Microelectronics Process Engineering at San Jose State University: A Manufacturing-Oriented Interdisciplinary Degree Program" International Journal of Engineering Education (2002): 519-525.