Publication Date
2003
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Chemical and Materials Engineering
Recommended Citation
Hon, Becky Min, "Characterization of shallow trench isolation etch line edge roughness" (2003). Master's Theses. 2444.
DOI: https://doi.org/10.31979/etd.53yx-bwm5
https://scholarworks.sjsu.edu/etd_theses/2444
COinS
