Study of Layout Dependent Radiation Hardness of FinFET SRAM using Full Domain 3D TCAD Simulation

Publication Date

10-14-2019

Document Type

Conference Proceeding

Publication Title

2019 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S)

DOI

10.1109/S3S46989.2019.9320706

Abstract

Due to the emerging of novel technologies, such as stacked horizontal nanowires, and novel 3D integration schemes, such as stacking PMOS on top of NMOS, multiple transistors in a SRAM cell might be struck simultaneously by a single Alpha particle. This may result in worse radiation hardness of SRAM. We show that if the access transistor (A-NMOS) and pull-down transistor (PD-NMOS) are struck at the same time, bulk MOSFET SRAM (Lg,eff = 25nm) will be ∼20% more susceptible to Single Event Upset (SEU). Full domain 3D TCAD simulation of Lg=25nm FinFET SRAM cell is then performed to confirm that such scenario is possible even in a standard SRAM layout and the radiation hardness is reduced by as much as 50%. Therefore, DTCO of 3D integration should take radiation effect into account for critical mission applications.

Funding Number

N00164-19-1-1001

Funding Sponsor

U.S. Department of Defense

Keywords

3D TCAD Simulation, DTCO, FinFET, Layout, Radiation Hardness, SRAM

Department

Electrical Engineering

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