Publication Date

Spring 1994

Degree Type

Master's Project

Degree Name

Master of Science (MS)

Department

General Engineering

First Advisor

Kevin Nguyen

Abstract

At this time semiconductor manufacturing techniques of data collection and equipment monitoring and control are through Cell Control enabling tools. FIX DMACS from Intellution is an application enabler ideal for Cell Control, currently being used in other process industries. This software is perfect for semiconductor industry except for, that it lacks communication capabilities with semiconductor equipment. In other words, it does not have a SECS interface or SECS driver that will enable it to communicate with any SECS compliant equipment. The first part of my project report discusses FIX DMACS capabilities and proposes SECS message set as a minimum design specification for a SECS Driver.

The second part of my project report describes Cell Controllers and Equipment Controllers in semiconductor manufacturing. The Equipment control implementation have been done successfully using Grapheq from FASTech Integration as Equipment Controller software on Applied Materials Precision 5000 Cluster tool. A set of manual operations and processes performed on Precision 5000 are taken and this activity is automated using equipment controller. Appendix C gives a detailed source of the programs developed on Grapheq.

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