Publication Date
1996
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Materials Engineering
Recommended Citation
Chun, Kaynam, "Microstructure and chemistry of thermal oxide on titanium silicide thin film" (1996). Master's Theses. 1214.
DOI: https://doi.org/10.31979/etd.vqpq-9tr2
https://scholarworks.sjsu.edu/etd_theses/1214
COinS
