Publication Date
1997
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Materials Engineering
Recommended Citation
Nagy, Ferenc A., "Hydrogen redistribution in annealed silicon nitride thin films deposited by PECVD" (1997). Master's Theses. 1458.
DOI: https://doi.org/10.31979/etd.wf7u-geuq
https://scholarworks.sjsu.edu/etd_theses/1458
COinS
