Publication Date
1997
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Chemical and Materials Engineering
Recommended Citation
Bui, Bang, "Characterizatioin of HF/H₂O vapor phase etching of SiO₂" (1997). Master's Theses. 1555.
DOI: https://doi.org/10.31979/etd.duc7-ku8q
https://scholarworks.sjsu.edu/etd_theses/1555
COinS
