Publication Date
2001
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Chemical and Materials Engineering
Recommended Citation
Kamp, Tom, "PECVD of undoped silicon glass film on 300mm wafers" (2001). Master's Theses. 2145.
DOI: https://doi.org/10.31979/etd.vff4-v4cq
https://scholarworks.sjsu.edu/etd_theses/2145
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