Publication Date
2002
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Chemical Engineering
Recommended Citation
Ranganathan, Rohini, "Ultrathin nitrided gate oxides - growth, measurement and characterization" (2002). Master's Theses. 2293.
DOI: https://doi.org/10.31979/etd.cu5n-g4n8
https://scholarworks.sjsu.edu/etd_theses/2293
COinS
