Publication Date
2004
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Chemical and Materials Engineering
Recommended Citation
Hermosillo, Gilbert K., "Investigation of deposition and annealing temperatures on stiction in MEMS" (2004). Master's Theses. 2603.
DOI: https://doi.org/10.31979/etd.vtfp-c6dw
https://scholarworks.sjsu.edu/etd_theses/2603
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