Publication Date
2004
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Chemical and Materials Engineering
Recommended Citation
Lim, Jongchul, "Characterization of thin SiO₂ and SiO[subscript x]N[subscript y] grown by thermal oxidation" (2004). Master's Theses. 2668.
DOI: https://doi.org/10.31979/etd.8t2x-f696
https://scholarworks.sjsu.edu/etd_theses/2668
COinS
