Publication Date
2004
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Chemical and Materials Engineering
Recommended Citation
Vroom, Daniel, "Effects of doping on release stiction for polysilicon MEMS applications" (2004). Master's Theses. 2689.
DOI: https://doi.org/10.31979/etd.puq8-ygme
https://scholarworks.sjsu.edu/etd_theses/2689
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