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Publication Date
2006
Degree Type
Thesis - Campus Access Only
Degree Name
Master of Science (MS)
Department
Chemical Engineering
Recommended Citation
Tai, April, "Electrical characterization of silicon dioxide and silicon oxynitride thin films" (2006). Master's Theses. 2981.
DOI: https://doi.org/10.31979/etd.dunk-3588
https://scholarworks.sjsu.edu/etd_theses/2981