Publication Date
1992
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Materials Engineering
Recommended Citation
Liao, Jimmy C., "Chemical vapor deposition of polycrystalline silicon in a rapid thermal processor" (1992). Master's Theses. 337.
DOI: https://doi.org/10.31979/etd.86t7-2d3h
https://scholarworks.sjsu.edu/etd_theses/337
COinS
