Publication Date
1994
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Materials Engineering
Recommended Citation
Quinn, Thomas Arthur, "The characterization of residual gases in a production sputtering system" (1994). Master's Theses. 946.
DOI: https://doi.org/10.31979/etd.3jfs-jnyx
https://scholarworks.sjsu.edu/etd_theses/946
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