Document Type

Article

Publication Date

October 2013

Publication Title

Journal of Applied Physics

Volume

114

Issue Number

15

DOI

10.1063/1.4825218

ISSN

0021-8979

Keywords

Metal oxides, Chemical elements, Lotus effect, Chemical bonding, Atomic layer deposition, Density functional theory, Thin films, X-ray photoelectron spectroscopy, Materials treatment, Semiconductors

Disciplines

Chemical Engineering | Materials Science and Engineering

Abstract

The dependence of the “self cleaning” effect of the substrate oxides on substrate temperature during atomic layer deposition (ALD) of HfO2 on various chemically treated and native oxide InP (100) substrates is investigated using in situ X-ray photoelectron spectroscopy. The removal of In-oxide is found to be more efficient at higher ALD temperatures. The P oxidation states on native oxide and acid etched samples are seen to change, with the total P-oxide concentration remaining constant, after 10 cycles of ALD HfO2 at different temperatures. An (NH4)2 S treatment is seen to effectively remove native oxides and passivate the InP surfaces independent of substrate temperature studied (200 °C, 250 °C and 300 °C) before and after the ALD process. Density functional theory modeling provides insight into the mechanism of the changes in the P-oxide chemical states.

Comments

SJSU users: Use the following link to login and access the article via SJSU databases.This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Journal of Applied Physics volume 114, issue 15, 2013, and may be found at https://doi.org/10.1063/1.4825218© 2013 AIP Publishing LLC.

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