Publication Date
2000
Degree Type
Thesis
Degree Name
Master of Science (MS)
Department
Chemical and Materials Engineering
Recommended Citation
Alaoui, Mohamed, "Emissions characterization during remote NF₃/O₂ chamber clean of silicon carbide" (2000). Master's Theses. 2033.
DOI: https://doi.org/10.31979/etd.8vv8-duth
https://scholarworks.sjsu.edu/etd_theses/2033
COinS
